In scenarios such as semiconductor wet process, fine chemical synthesis, and biopharmaceuticals, the transportation of high-purity chemicals not only requires pipeline materials to have "chemical inertness" to strong acids and bases, but also requires them to be able to withstand high flow and high velocity working conditions. Although ordinary small-diameter PFA pipes can meet the purity requirements, they often face transportation efficiency bottlenecks due to insufficient diameter. The PFA large-diameter industrial hose with an inner diameter of 22mm is a professional product designed to meet this demand - it guarantees high purity of the medium with the chemical stability of PFA material, achieves high flow and efficient transportation with a large diameter design, and adapts to the full field process from deep cold to high temperature with an ultra wide temperature range of -200 ℃ to+260 ℃.
1、 22mm inner diameter: industrial value of large-diameter design
In scenarios such as semiconductor front-end processes, loading and unloading of high-purity chemical tankers, and transfer of fine chemical raw materials, the high flow demand imposes clear requirements on the diameter of pipelines. According to industry product specifications, PFA large-diameter pipes cover inner diameters of 22mm and 25mm, outer diameters of 25mm and 25.4mm, and wall thicknesses of 1.5-1.6mm. Schwer's PFA thin-walled hoses also offer di 22mm specifications, wall thickness of 1.5mm, and a small bending radius of 1150mm.
The core value of large-diameter design lies in the optimization of flow resistance and velocity. The flow area of a 22mm inner diameter pipe is about 3.4 times that of a 12mm pipe, which can transport larger flow rates of chemicals at the same flow rate, significantly improving the efficiency of the chemical supply system. Entegris' FluoroLine ® The series of ultra pure PFA pipes can provide a complete size range from 1/4 inch to 40mm, with a small bending radius of only 279mm for the 1-inch (approximately 25.4mm) specification, balancing high flow and flexibility for on-site installation. The PFA chemical hose released by Litong Technology covers a diameter range of 3mm to 406mm and a temperature range of -60 ℃ to+200 ℃. It is specifically designed for transporting high-purity media in the fields of semiconductors, chemicals, biopharmaceuticals, and more.
2、 High purity corrosion resistance: the dual advantages of chemical and mechanical properties of PFA material
PFA, also known as perfluoroalkoxy resin, has a molecular structure with carbon fluorine bonds as the main chain, retaining almost all of PTFE's chemical inertness advantages. At the same time, it has better mechanical properties and flexibility due to its melt processability. Compared to FEP (continuous use temperature of 205 ℃), PFA can be used for a long time at temperatures ranging from -200 ℃ to 260 ℃, significantly improving its heat resistance; Compared with PTFE, PFA has better resistance to stress cracking and bending, and its mechanical strength at high temperatures is even better than PTFE.
For the transportation of high-purity chemicals, the low precipitation characteristics of PFA are the core value. In the chemical cleaning and etching processes of semiconductor manufacturing, the precipitation of any metal ions or organic compounds may directly lead to wafer defects. The high-purity PFA tube has passed the SEMI F57 standard certification, and the fluoride ion and metal leaching amounts have been confirmed by third-party testing, fully meeting the standards for ultra clean fluid treatment. Entegris has further optimized metal precipitation control in its Ultra Clean (UC) series, with pipes manufactured in ISO 7 clean environments to ensure surface contamination is reduced.
In terms of chemical corrosion resistance, PFA can withstand long-term corrosion from almost all strong acids, strong bases, and organic solvents, including extreme corrosive media such as aqua regia, hydrofluoric acid, and concentrated hydrochloric acid. The TUF-200 series PFA pipes from Donghai Company are clearly marked as having high inner wall smoothness, which can control the segregation of ions to a very low level without affecting the transport of fluids. The combination of chemical inertness and high purity makes the 22mm large-diameter PFA tube a standard configuration in wet etching, CMP slurry transportation, bulk chemical supply, and other scenarios.
3、 Industrial scene adaptation of large-diameter PFA pipes
The application of PFA large-diameter industrial hoses runs through multiple fields with strict requirements for corrosion and purity, such as semiconductors, chemicals, and pharmaceuticals.
Semiconductor and flat panel display manufacturing are the application markets for PFA large-diameter tubes. In the previous process, 25mm grade PFA pipes are used in bulk chemical conveying systems to transport high-purity etching and cleaning solutions from the storage tank area to the process machines. Entegris explicitly applies its PFA tubes to "photolithography, CMP, bulk chemical transportation, as well as wet etching and cleaning processes". In the transportation of low surface tension chemicals such as isopropanol, the low permeability and smooth inner wall of PFA tubes can effectively reduce particle adhesion and medium penetration.
In the context of fine chemicals and raw material transfer, large-diameter PFA pipes are commonly used for in plant transfer of strong acids, strong bases, and organic solvents. Its wide temperature resistance range allows it to transport high-temperature reaction liquids or low-temperature media. When chemical companies choose PFA pipes, they need to pay attention to their pressure resistance performance - the working pressure of ATG series PFA pipes can reach 1.0-1.7MPa at 20 ℃, gradually decreasing with temperature, and about 0.1-0.23MPa at 260 ℃. This characteristic requires a corresponding reduction in system pressure or an increase in pipe wall thickness under high temperature conditions.
In terms of installation and maintenance, large-diameter PFA pipes are usually supplied in the form of coils, with standard coil lengths of 10 meters, 20 meters, or 50 meters. Attention should be paid during installation: PFA has stronger rigidity than FEP, with a 1-inch small bending radius of 279mm, and sufficient space should be reserved for on-site pipe laying; It is recommended to use expansion joints or double sleeve joints to ensure long-term reliability of joint sealing during high temperature cycles.
In summary, the PFA large-diameter industrial hose with an inner diameter of 22mm perfectly meets the composite requirements of "high flow rate, high purity, and corrosion resistance" for high-purity chemicals in the semiconductor, chemical, pharmaceutical, and other fields due to its efficient conveying capacity designed with a large diameter, chemical inertness and low precipitation characteristics of PFA material, and extreme working conditions with a wide temperature range of -200 ℃ to 260 ℃. From CMP slurry to bulk chemicals, from wet etching to high-temperature reaction solution transportation, this "large-diameter high-purity pipeline" is providing efficient and reliable fluid transportation guarantee for high-end manufacturing processes.